With metal bellows and
vacuum technology
create new value

IRIE KOKEN utilizes advanced processing and welding technology for metal bellows and vacuum know-how.
We are an R&D-oriented company that develops and manufactures high value-added products, mainly in the field of semiconductor manufacturing.
We will continue to create new technologies by fusing the technology we have cultivated so far with the spirit of challenge.

With metal bellows and
vacuum technology
create new value

IRIE KOKEN utilizes advanced processing and welding technology for metal bellows and vacuum know-how.
We are an R&D-oriented company that develops and manufactures high value-added products, mainly in the field of semiconductor manufacturing.
We will continue to create new technologies by fusing the technology we have cultivated so far with the spirit of challenge.

With metal bellows and
vacuum technology
create new value

IRIE KOKEN utilizes advanced processing and welding technology for metal bellows and vacuum know-how.
We are an R&D-oriented company that develops and manufactures high value-added products, mainly in the field of semiconductor manufacturing.
We will continue to create new technologies by fusing the technology we have cultivated so far with the spirit of challenge.

 

Feature

About IRIE KOKEN

IRIE KOKEN is a manufacturer that develops and manufactures high-precision metal bellows and vacuum equipment (vacuum bellows, vacuum valves, vacuum chambers, etc.) that utilizes vacuum technology.

ProductS

Product Information

Metal Bellows

Metal Bellows

IRIE KOKEN's basic technology lies in the production of metal bellows.
In particular, we are focusing on the precision bellows field that requires high
performance and high reliability, and are widely used in the vacuum field.

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Welded Bellows

Welded Bellows

This metal bellows is manufactured by
alternately welding the inner and outer
diameters of thin metal plates on precision
discs and joining them together.

Molded Bellows

Formed Bellows

Historically older than welded bellows,
various manufacturing methods have been
devised. The most commonly used methods
are mechanical roll forming and hydraulic
bulge forming.

Flexible Tube

Flexible Tube

A flexible tube is a relatively small-diameter
bellows used for piping in equipment that
can be freely bent.

Vacuum Valve

Vacuum Valve

It is for isolating vacuum from vacuum and vacuum from atmosphere. In addition to being used to isolate various processes in manufacturing displays and semiconductor substrates, it is also used to adjust the pressure of the vacuum chamber by placing it between the vacuum chamber and the vacuum pump.

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Square Gate Valve

Square Gate Valve

This is a high-quality square gate valve that
can also be used for next-generation LSI and
LCD manufacturing equipment.
A high level of dust-free operation is strictly
required in recent process lines for highly
integrated devices, compound
semiconductors, and optical devices.

Round Gate Valve

Round Gate Valve

MARINA is a round pendulum type valve with stable sealing performance, simple structure and compact design. We support everything
from semiconductor manufacturing
equipment to large FPD and organic EL
manufacturing equipment.

Large Gate valve(Square)

Large Gate valve
(Square)

Employs a differential pressure canceling mechanism, making it easy to increase the size of the seal opening (experienced from G5 to G10), improving the reliability of sealing
performance, and eliminating the need for
tilting the valve plate, resulting in stable
sealing operation and improved reliability.

L-type Valve(Angle Valve)

L-type Valve
(Angle Valve)

The high-vacuum angle valve is a long-life
vacuum valve with a built-in molded/welded bellows that has a proven track record.

Vacuum Equipment

Feedthroughs

We provide highly customized semiconductor components and equipment as a supplier of manufacturing equipment for semiconductor devices with various applications and demanding performance requirements.

We also offer a variety of standardized feedthroughs. They can be used up to the high vacuums. (The bellows sealed linear feedthroughs can be used up to ultra-high vacuum.) The bellows type uses our own highly reliable metal welded bellows.

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Bellows Straight Line (Straight Line)Introduction Machine

Bellows sealed
Linear feedthroughs

IRIE KOKEN's linear feedthroughs, incorporating our high-reliability welded bellows, enable long strokes. We offer many different sizes as well as manual and automatic types.

Bellows Type Rotary Feedthrough Machine

Bellows sealed
rotary feedthroughs

IRIE KOKEN's bellows-sealed rotary feedthoughs are available in high-precision roatary feedthoughs and compact roatary feedthoughts as a unit to conduct rotational motion from the atmmosphere side to the vacuum side. They can be used in regions up to high vacuum because metal welded bellows are used for isolation between the vacuum and atmosphere.

Shutter/XY Table

Shutter / XY Table

We provide high quality XY tables with advanced positioning technology.

Chamber

Chamber

We provide customer customized vacuum chambers with advanced welding and fabrication techniques. We have also delivered many products with complex specifications to national projects.

The ultra-high Vacuum Pump

Regarding the NEG (Non-Evaporable Getter) 

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technical
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Technical Information

This section contains technical information held by Irie Koken.

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IRIE KOKEN In Video

【Factory Tour】
Nakayama Factory
(Ehime Prefecture)

【Manufacturing Process】
Bellows

Created by the Ehime Prefectural Board of Education
Junior high school work experience learning

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