Linear Feedthroughs

Linear feedthroughs are products that are used to linearly feed
equipment/devices in a vacuum from the atmosphere side while
preserving them in a vacuum state. Our linear feed throughs are used by
our customers for various purposes, such as lowering substrate stages
and transferring wafers. With two types of linear feedthroughs available,
including a bellows seal type and a magnetic seal type with manual and
automatic drive systems, IRIE KOKEN offers products that meet various
demands.

IRIE KOKEN’s welded bellows are incorporated, and strokes from 10 to 200mm are standardized.Adoption of welded bellows for the drive part seal allows it to be used in ultrahigh vacuum regions.Downsizing and weight reduction are achieved by its very simple structure with emphasis on functionality.
The manual type is designed to withstand a baking temperature of 250°C.
* For the baking temperature and motor specifications of the automatic type, consult us. (It is designed individually.)

Bellows-sealed linear feedthrough : manual type (ILD-M)
Bellows-sealed linear feedthrough : automatic type (ILD-A)
Bellows-sealed compact linear feedthrough (ILC)

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Document Download

Bellows-sealed linear feedthrough manual type（ILD-M)

Bellows-sealed linear feedthrough automatic type (ILD-A)

Bellows-sealed compact linear feedthrough (ILC)

Common Specifications

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Model	ILC-34-▢	ILD-▢M▢	ILD-▢A▢
Drive method	Manual	Manual	Motor-driven
Leak rate	1×10^-10Pa・m³/s or less	1×10^-9Pa・m³/s or less
Baking temperature	150℃ or less	250℃ or less	-
Main material	SUS304
Bellows material	SUS315L

List of bellows-sealed linear feedthroughs

※左右にフリックしてご覧いただけます。

Compact feedthroughs Detailed specifications
Name	Drive method	Connection flange	End shaft diameter (h7)	Stroke	Model	Product drawing download
	Manual	CF34	φ6	10mm	ILC-34-10	PDF
				15mm	ILC-34-15	PDF
				20mm	ILC-34-20	PDF
Manual feedthroughs Detailed specifications
	Manual	CF34	φ6	30mm	ILD-34M30	PDF
		CF34	φ6	50mm	ILD-34M50	PDF
		CF70	φ8	30mm	ILD-70M30	PDF
				50mm	ILD-70M50	PDF
				100mm	ILD-70M100	PDF
		CF114	φ14	50mm	ILD-114M50	PDF
				100mm	ILD-114M100	PDF
				150mm	ILD-114M150	PDF
				200mm	ILD-114M200	PDF
Motor-driven feedthroughs Detailed specifications
	Motor-driven	CF70	φ8	50mm	ILD-70A50	PDF
				100mm	ILD-70A100	PDF
				150mm	ILD-70A150	PDF
		CF114	φ14	50mm	ILD-114A50	PDF
				100mm	ILD-114A100	PDF
				150mm	ILD-114A150	PDF
		CF152	φ22	100mm	ILD-152A100	-
		CF203	φ22	100mm	ILD-203A100	-

Individually designed products

Even in cases where specifications cannot be
satisfied with standard products
we will consider your individual needs.

If you have a specific request, please let us know the details of your specifications.
We will propose the best design for various uses, so please feel free to contact us.