Model | ILC-34-10 | ILC-34-15 | ILC-34-20 | |
---|---|---|---|---|
Stroke | 10mm | 15mm | 20mm | |
Connection flange | CF34 | |||
Drive method | manual | |||
Leak rate | 1×10-10Pa・m3/s or less | |||
Baking temperature | 250℃ | |||
Main material | SUS304 | |||
Bellows material | SUS316L | |||
Main dimensions | A | 50~60 | 50~65 | 50~70 |
B | 106~96 | 127~112 | 152~132 | |
C | 156 | 177 | 202 | |
Product drawing download |
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