Multi-operation feedthroughs are products that are used to move in more than one direction, linear feeding + rotation or perpendicular direction toward an axis + angular movement. In particular, the combination of our MFL series and TSL/TSN series are used by our customers in various fields.(Such as semiconductor manufacturing equipment and accelerator-related facilities)
With two types of multi-operation feedthroughs available, including a bellows seal type and a magnetic seal type with manual and automatic drive systems, IRIE KOKEN offers products that meet various demands.
This is a magnetic coupling type introduction mechanism using a strong permanent magnet. Two types are available: rotary introduction and linear rotary introduction, which can also be motor-driven. The use of samarium-cobalt magnets both inside and outside the vacuum allows high torque transmission, and the mechanism is designed to minimize lost motion. The driven magnet section inside the vacuum is canned with a thin stainless steel sheet to reduce gas emissions.
In addition, baking can be performed with the magnet installed.
By replacing the bearing, it can be used semi-permanently.
Motor drive is possible, making it easy to automate and remotely operate the conveyor.
Name | Magnetic rotary feedthroughs |
Magnetic linear rotary feed throughs |
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Appearance | ![]() |
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Model | MFR-34 | MFR-70 | MFL-70 | MFL-114 |
onnection flange | CF34 | CF70 | CF70 | CF114 |
Drive metode | Manual (or motor-driven) | Manual | ||
Rotation range | 360°continuous | |||
Linear stroke | - | 500,800,1000mm | ||
End shaft diameter | φ6(-0.01/-0.02) | φ10(-0.01/-0.02) | φ19h8 | |
Leak rate | 1×10-9Pa・m3/s or less | |||
Baking temperature | 120℃(with magnets) | |||
main materials | Main body:SUS304 Wheel:Alminum | |||
Product drawing download |
Name | Connecting flange | Model | |
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XY table![]() |
XY adjustment only | CF70 | TSL-70 |
CF114 | TSL-114 | ||
CF152 | TSL-152 | ||
XY and angle adjustment | CF70 | TSN-70 | |
CF114 | TSN-114 | ||
CF152 | TSN-152 | ||
Shutters![]() |
Manual | CF70 | RCS-70 |
CF114 | RCS-114 | ||
CF152 | RCS-152 | ||
CF203 | RCS-203 | ||
Automatic (air-driven) |
CF70 | ARS-70 | |
CF114 | ARS-114 | ||
CF152 | ARS-152 | ||
CF203 | ARS-203 |
If you have a specific request, please let us know the details of your specifications.
We will propose the best design for various uses, so please feel free to contact us.
For document requests and inquiries,
Please contact us using the email form below or by phone.