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Multi Motion Feedthroughs


Multi-operation feedthroughs are products that are used to move in more than one direction, linear feeding + rotation or perpendicular direction toward an axis + angular movement. In particular, the combination of our MFL series and TSL/TSN series are used by our customers in various fields.(Such as semiconductor manufacturing equipment and accelerator-related facilities)

With two types of multi-operation feedthroughs available, including a bellows seal type and a magnetic seal type with manual and automatic drive systems, IRIE KOKEN offers products that meet various demands.

This is a magnetic coupling type introduction mechanism using a strong permanent magnet. Two types are available: rotary introduction and linear rotary introduction, which can also be motor-driven. The use of samarium-cobalt magnets both inside and outside the vacuum allows high torque transmission, and the mechanism is designed to minimize lost motion. The driven magnet section inside the vacuum is canned with a thin stainless steel sheet to reduce gas emissions.

In addition, baking can be performed with the magnet installed.
By replacing the bearing, it can be used semi-permanently.
Motor drive is possible, making it easy to automate and remotely operate the conveyor.







マルチ導入機シリーズ

Magnetic rotary feedthroughs(MFR)

 

          



Magnetic linear rotary feed throughs(MFL)



          



Bellows-sealed shutter(RCS)



          



XY table mechanism(TSL/TSN)



               

 

磁気結合式導入機リスト








※左右にフリックしてご覧いただけます。
Name Magnetic rotary feedthroughs

Detailed specifications

Magnetic linear rotary feed throughs

Detailed specifications

Appearance 磁気結合式回転導入機 磁気結合式直進回転導入機
Model MFR-34 MFR-70 MFL-70 MFL-114
onnection flange CF34 CF70 CF70 CF114
Drive metode Manual (or motor-driven) Manual
Rotation range 360°continuous
Linear stroke - 500,800,1000mm
End shaft diameter φ6(-0.01/-0.02) φ10(-0.01/-0.02) φ19h8
Leak rate 1×10-9Pa・m3/s or less
Baking temperature 120℃(with magnets)
main materials Main body:SUS304 Wheel:Alminum
Product
drawing
download

PDF

PDF

PDF

PDF

 

XY table and Shutters List








※左右にフリックしてご覧いただけます。

Name Connecting flange Model
XY table

XYテーブルの写真 
 

Detailed specifications

XY adjustment only CF70 TSL-70 
CF114 TSL-114
CF152 TSL-152
XY and angle adjustment CF70 TSN-70
CF114 TSN-114
CF152 TSN-152
Shutters

シャッターの写真   

Detailed specification

Manual  CF70 RCS-70
 CF114 RCS-114
 CF152 RCS-152
CF203  RCS-203
Automatic
(air-driven)
 CF70 ARS-70
 CF114 ARS-114
 CF152 ARS-152
 CF203 ARS-203

Individually designed products

Even in cases where specifications cannot be
satisfied with standard products
we will consider your individual needs.

If you have a specific request, please let us know the details of your specifications.
We will propose the best design for various uses, so please feel free to contact us.

Related Information

Columns

Solution cases

Inquiry

For document requests and inquiries,
Please contact us using the email form below or by phone.