Model | MFR-34 | MFR-70 | |
---|---|---|---|
Connection flange | CF34 | CF70 | |
Drive method | Manual (or motor-driven) | ||
Rotation range | 360° | ||
Leak rate | 1×10-9Pa・m3/s or less | ||
Baking temperature | 120℃ (with magnets) | ||
Main materials | Main body:SUS304 Wheel:Aluminum |
||
Main dimensions |
A | 50 | 50 |
B | 100 | 165 | |
C | 34.7 | 55 | |
D | 12.0 | 12.5 | |
E | 20 | 20 | |
φF-0.01 -0.02 | 6 | 10 | |
G | 5 | 9 | |
φH | 18 | 40 | |
φI | 38 | 73 | |
φJ | 40 | 73 | |
Product drawing download |
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