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Vacuum Valve



We manufacture gate valves, which are partition valves used in semiconductor and flat panel display (FPD) manufacturing equipment, mainly for the feeding ports of substrates to be transported and between two vacuum chambers.
First, we have advanced with the progress of microfabrication technology in semiconductor manufacturing, and have completed the “KOSLARZE” sluice gate valve.
In the field of display manufacturing equipment, in order to achieve both large substrate size and high sealing performance, we have perfected the large gate valve “GARIVA”, which utilizes metal bellows technology, and have been providing vacuum gate valves to the semiconductor and FPD markets for more than 30 years.

Please contact us for product details and quotations.

 

Main applications


"Partice free"+"High sealablilty"+"Easy maintenance"

  • As sluice valves for semiconductor manufacturing equipment
  • As sluice valves for flat panel display manufacturing equipment
  • High technology is always required for gate valves.
    The above three elements are particularly important.


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Types of Gate Valves

There are several types of gate valves, depending on differences in manufacturing methods and specifications.
We mainly offer the following three types.

コスラーズ

KOSLARZE

A gate valve developed and developed with "non-sliding" as a design concept.

----------------------------------------------------------I want to use it as a sluice valve for semiconductor manufacturing equipment.

Please select the following case
ガリバー

GARIVA

It is a gate valve that is synonymous with our company, which specializes in large opening sizes.
----------------------------------------------------------I want to use it as a sluice valve for flat panel display manufacturing equipment.

Please select the following case
マリーナ

MARINA




----------------------------------------------------------I want to use it as an exhaust valve.


Please select the following case



A vacuum gate valve is required to have the function of isolating and sealing a vacuum and the atmosphere or vacuum spaces different in pressure for surface treatment of various substrates in vacuum equipment. In line with the recent scaling up in size of vacuum equipment, there is an increasing demand for upsizing of the opening sizes of vacuum gate valves. The vacuum gate valves can be classified into the following three specifications according to the operating direction of the valve body.

①Negative pressure specification:
The valve body is sealed from the vacuum side toward the atmosphere side (low pressure⇒high pressure). (It is an image similar to attempting a running faucet with the palm of a hand.)
②Equal pressure specification:
The pressures of two spaces shielded by the valve body are approximately the same.
③Positive pressure specification:
The valve body is sealed from the atmosphere side toward the vacuum side (high pressure⇒low pressure). (It is an image similar to turning of the tap while draining a bathtub filled with water.)


Our company is ready to respond to your requests.
Please feel free to contact us for the best design for your various uses.


Q

Is maintenance required?

A

Maintenance is required. Types of maintenance include “daily inspection” to check O-rings, grease condition, etc., and “periodic maintenance” to replace O-rings and perform overhauls. We also offer services such as upgrades and retrofits to improve performance.
For details, please contact our sales or service departments.

Q

Do you have an overseas support system?

A

We have service offices and sales agents in Korea, China, and Taiwan.

Q

Can you replace O-rings in-house?

A

Yes, you can replace the valve plate O-ring by yourself by taking our training course. The use of a dedicated jig improves work efficiency and accuracy. Customized jigs are also available to suit your environment and purpose.
For details, please contact our sales or service departments.

Related Information

Columns

Solution Cases

Technical Information

Please take a look at the technical information on gate valves.

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Inquiry

For document requests and inquiries,
Please contact us using the email form below or by phone.