We manufacture gate valves, which are partition valves used in semiconductor and flat panel display (FPD) manufacturing equipment, mainly for the feeding ports of substrates to be transported and between two vacuum chambers.
First, we have advanced with the progress of microfabrication technology in semiconductor manufacturing, and have completed the “KOSLARZE” sluice gate valve.
In the field of display manufacturing equipment, in order to achieve both large substrate size and high sealing performance, we have perfected the large gate valve “GARIVA”, which utilizes metal bellows technology, and have been providing vacuum gate valves to the semiconductor and FPD markets for more than 30 years.
Please contact us for product details and quotations.
"Partice free"+"High sealablilty"+"Easy maintenance"
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There are several types of gate valves, depending on differences in manufacturing methods and specifications.
We mainly offer the following three types.
A vacuum gate valve is required to have the function of isolating and sealing a vacuum and the atmosphere or vacuum spaces different in pressure for surface treatment of various substrates in vacuum equipment. In line with the recent scaling up in size of vacuum equipment, there is an increasing demand for upsizing of the opening sizes of vacuum gate valves. The vacuum gate valves can be classified into the following three specifications according to the operating direction of the valve body.
Our company is ready to respond to your requests.
Please feel free to contact us for the best design for your various uses.
Maintenance is required. Types of maintenance include “daily inspection” to check O-rings, grease condition, etc., and “periodic maintenance” to replace O-rings and perform overhauls. We also offer services such as upgrades and retrofits to improve performance.
For details, please contact our sales or service departments.
We have service offices and sales agents in Korea, China, and Taiwan.
Yes, you can replace the valve plate O-ring by yourself by taking our training course. The use of a dedicated jig improves work efficiency and accuracy. Customized jigs are also available to suit your environment and purpose.
For details, please contact our sales or service departments.
Please take a look at the technical information on gate valves.
For document requests and inquiries,
Please contact us using the email form below or by phone.