Over the last three decades, the semiconductor market has evolved without being bound by Moore's Law, and miniaturization has made rapid progress from Microscale to nanoscale.
Manufacturing equipment has also been miniaturized through continuous technological development, and the vacuum gate valves mounted on it are also required to constantly improve their performance.
We are working on high functionality every day to meet the growing market demand.
・Main valve for exhaust |
Leak rate |
Body:1 × 10-10[Pa・m3/s] Gate:5 × 10-10[Pa・m3/s](Negative pressure) |
---|---|
Temperature |
Body :120 [℃ ] Actuator :60 [℃ ] |
Open/Close moving time | 3.0 ~ 5.0 [s] |
Material |
Body:AC4C-T6 Bellows:SUS316L(Pressure cancellation) Gate:A5052 Sealing:FKM |
operating Air pressure | 0.45 ~ 0.60 [MPa] |
Service life | 1M[Cycles] |
Option | Spec without Pressure cancellation |
Bore | Type | A | B | C | D | E |
250 | M-250J(S)-2(3) | 460 | 655 | 100 | 134.5 | 250 |
320 | M-320J(S)-2(3) | 555 | 790 | 120 | 129.5 | 320 |
400 | M-400J(S)-2(3) | 630 | 944 | 135 | 129 | 400 |
|
Leak rate | Gate:5 x 10-10[Pa・m3/s](Equal/Positive pressure) |
---|---|
Temperature |
Body/Gate :120 [℃ ] Actuator :60 [℃ ] |
Open/Close moving time | 2.5~ 5.0 [s] |
Material |
Gate:A5052 Sealing:FKM |
Operating Air pressure | 0.45 ~ 0.60 [MPa] |
Service life | 1M[Cycles] |
If you have specific requirements, please let us know the details of your specifications.
We will be happy to provide you with force calculations and design proposals that meet your required specifications.
In addition to square gate valves (for partitioning of substrate transfer), main valves for exhaust are also available.
MARINA type (valve mechanism is based on the same concept as GARIVA) and LINK type are available upon request.
This is a product based on the same concept as the large vacuum gate valve GARIVA. The pressure cancel mechanism inside the valve eliminates the load of atmospheric pressure against the seal and allows the valve to withstand reverse pressure with less force. The bellows used in the pressure cancellation mechanism is our own product.
The standard specification is for a maximum bore size of 400 mm. We can accommodate up to 500 mm upon customer request.
This is a gate valve to be installed at the substrate inlet of the load lock chamber. It is not a valve installed between each chamber, so it does not use a valve box or bellows.
FPD production equipment is becoming larger and larger, and the maximum substrate inlet size can exceed 3000 mm. CDV provides simple and stable sealing even in large openings by using a cylinder inside the valve to press on multiple points.
The CDV is installed at the board inlet.
The CDV is installed at the substrate inlet and requires less sealing force than a vacuum gate valve, resulting in a simple, lightweight, and highly reliable product with fewer parts.
Please take a look at the technical information on gate valves.
For document requests and inquiries,
Please contact us using the email form below or by phone.