Vacuum valves are used to isolate vacuum from vacuum and vacuum from atmosphere.
They are used to isolate various processes in the fabrication of displays and semiconductor substrates, and are also used to regulate vacuum chamber pressure by placing them between the vacuum chamber and the vacuum pump.
Vacuum valves are used to isolate a vacuum to which heat, gases, or plasma have been added. They must be airtight to isolate the vacuum from the atmosphere without destroying it.
KOSLARZE consists of a case (valve box) with a square opening through which substrates pass, a partition plate (valve plate) to close the opening, and a mechanism (drive unit) to operate the valve plate.
Substrates are placed in the processing chamber and kept in a sealed environment by closing the gate valve, where they are exposed to heat, gases, plasma, etc. for various types of film formation. These processes are mainly performed under vacuum, and the gate valve must have high sealing performance to maintain this environment. KOSLARZE is one of our products.
This is a large-aperture gate valve especially designed for ultra-large substrates. Among our products, GARIVA, which employs a differential pressure cancellation mechanism, falls into this category. It is a highly reliable valve with a proven track record of delivery of large valves with an opening size of 3000 mm or more and stable sealing operation.
To ensure high sealing performance, the valve plate sealing material must be compressed uniformly even in large openings. To achieve this, the valve plate can be pressed at multiple points by increasing the number of KOSLARZE units, or by installing an air cylinder inside the valve plate to drive the seal at a position very close to the opening (GARIVA).
A round pendulum type valve with stable sealing performance, simple structure, and compact design. It is mainly installed between the processing chamber and the vacuum pump as a partition in the exhaust system. Some valves have a function to stop the valve opening at an arbitrary position in order to adjust the chamber pressure (conductance valve).
Like the KOSLARZE, it consists of a valve box, a valve plate, and a drive unit. The opening shape is round for connection to a vacuum pump. MARINA is applicable among our products.
L type valves (angle valves) are mainly installed between the chamber and the rougher pump as partitions in the exhaust system.
Currently, only the following models are available.
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