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Rotary Feedthroughs


Rotary feedthroughs are products that are used to rotate equipment/
devices in a vacuum from the atmosphere side while preserving them in
a vacuum state. Our rotary feed throughs are used by our customers
for various purposes, such as rotating substrates and switching shutters.
With two types of rotary feedthroughs available, including a bellows seal
type and a magnetic seal type with manual and automatic drive systems,
IRIE KOKEN offers products that meet various demands

These bellows-sealed rotary feedthroughs are available with high-precision rotary feedthroughs and compact rotary feedthroughs as a unit and conduction rotational motion from the atmosphere side to the vacuum unit. They can be used in regions up to high vacuums because metal welded bellows are used for isolation between the vacuum and atmosphere.
We offer two types of compact rotary feedthroughs. One type includes a rotational positioning accuracy (at no load) of 2°±0.5°, while the other type includes high-precision rotary feedthroughs with an accuracy of as high as 0.5°.

Adoption of welded bellows for the drive part seal allows it to be used in ultrahigh vacuum regions.
Downsizing and weight reduction are achieved by its very simple structure with emphasis on functionality.
It is designed to withstand a baking temperature of 150°C (120°C ).






大型矩形溶接ベローズ_A.jpg

Compact rotary feedthroughs (IRC)

 

             






High-precision rotary feedthroughs(IRP)



             



Common Specifications








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Model IRC-34 IRC-70 IRP-70
Drive method Manual
Leak rate 1×10-10Pa・m3/s 以下1×10-9Pa・m3/s or less
Baking temperature 150℃ or less 120℃ or less
Main material SUS304
Bellows material SUS316L
Rotation life 100,000 rotations

List of bellows-sealed rotary feed throughs








※左右にフリックしてご覧いただけます。

Name Model Connection
flange
End shaft
diameter
Rotational
positioning
accuracy
(at no load)
Product drawing
download
Compact rotary
feedthroughs

Detailed specifications


IRC-34


CF34

φ6(f6)



2°±0.5°

PDF

IRC-70


CF70

φ8(f6)

PDF
High-precision rotary
feedthroughs

Detailed specifications



IRP-70




CF70


φ10(e7)


0.5°±0.05°


PDF

Individually designed products

Even in cases where specifications cannot be
satisfied with standard products
we will consider your individual needs.

If you have a specific request, please let us know the details of your specifications.
We will propose the best design for various uses, so please feel free to contact us.

Related Information

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Solution cases

Inquiry

For document requests and inquiries,
Please contact us using the email form below or by phone.