Over the last three decades, the semiconductor market has evolved without being
bound by Moore's Law, and miniaturization has made rapid progress from Microscale to nanoscale. Manufacturing equipment has also been miniaturized through continuous technological development, and the vacuum gate valves mounted on it are also required to constantly improve their performance. We are working on high functionality every day to meet the growing market demand.
・Particle-free
・Simple structure
・Long life (in-house bellows)
Leak rate | Body:1 × 10-10[Pa・m3/s] Gate:5 × 10-10[Pa・m3/s] (Negative pressure) |
---|---|
Temperature | Body/Gate :120[℃ ] Actuator :60[℃ ] |
Open/Close moving time | 1.0 ~ 3.0[s] |
Operating Air pressure | 0.45 ~ 0.55[MPa] |
Service life | 1M [Cycles] |
Option | Heating function: Gate,Body Sealing direction:Equal,Positive pressure |
If you have specific requirements, please let us know the details of your specifications.
We will be happy to provide you with force calculations and design proposals that meet your required specifications.
Continuous reduction of particles is a challenge in the semiconductor industry. Particles generated as valves open and close can be a problem. Approaching particle-free operation is a prerequisite.
The simple structure minimizes breakdowns.
We are also a bellows manufacturer. We have been supplying bellows to our customers for more than 50 years since our establishment.
The long-life bellows produced by our long years of experience help to ensure the high quality of our valves..
For document requests and inquiries,
Please contact us using the email form below or by phone.