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"KOSLARZE" Single-sided seal Normal type


Over the last three decades, the semiconductor market has evolved without being
bound by Moore's Law, and miniaturization has made rapid progress from Microscale to nanoscale. Manufacturing equipment has also been miniaturized through continuous technological development, and the vacuum gate valves mounted on it are also required to constantly improve their performance. We are working on high functionality every day to meet the growing market demand.

    • Single-sided seal Normal type
      A gate valve developed and developed with "non-sliding" as a design concept. Since its birth, its reliable performance has been evaluated, and it is now used in various markets and environments.
      We will customize it according to the diverse needs of our customers, such as opening size, pressure conditions, high temperature compatibility, and the presence or absence of a valve box.

    • Both-sided seal       Seal direction switching type
      A gate valve with additional functions added to the Normal type. By switching the seal direction to the transfer chamber side, a vacuum other than the process chamber that is open to the atmosphere is maintained, so that the equipment can continue to operate even during maintenance of the process chamber. In that state, the O-ring for the valve plate seal on the process chamber side can be easily replaced.
koslarze2 SEMI.jpg

Single-sided seal Normal type


・Particle-free
・Simple structure
・Long life (in-house bellows)

Standard Specification

Leak rate  Body:1 × 10-10[Pa・m3/s]
 Gate:5 × 10-10[Pa・m3/s]
     (Negative pressure) 
Temperature Body/Gate :120[℃ ]
Actuator :60[℃ ]
Open/Close moving time  1.0 ~ 3.0[s]
Operating Air pressure  0.45 ~ 0.55[MPa]
Service life 1M [Cycles]
Option Heating function: Gate,Body
Sealing direction:Equal,Positive pressure
                                                     
コスラーズ Normal type

Single-sided seal
Normal type

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Normal vacuum gate valve for semiconductor equipment.

コスラーズ seal 方向切り替えtype

Both-sided seal
Seal direction switching type

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Vacuum gate valve with additional functions to the Normal type.

Custom Design

Please let us know your requirements.
We will consider your request individually.

  • We want to reduce particles to accommodate miniaturization.
  • We want to reduce the release of adherent particles by reducing vibration.
  • We want to reduce equipment downtime during maintenance.

If you have specific requirements, please let us know the details of your specifications.
We will be happy to provide you with force calculations and design proposals that meet your required specifications.

コスラーズ

KOSLARZE

A gate valve developed and developed with "non-sliding" as a design concept.

----------------------------------------------------------I want to use it as a sluice valve for semiconductor manufacturing equipment.

Please select the following case
ガリバー

GARIVA

It is a gate valve that is synonymous with our company, which specializes in large opening sizes.
----------------------------------------------------------I want to use it as a sluice valve for flat panel display manufacturing equipment.

Please select the following case
マリーナ

MARINA




----------------------------------------------------------I want to use it as an exhaust valve.


Please select the following case

FAQ

Q

Particle-free

A

Continuous reduction of particles is a challenge in the semiconductor industry. Particles generated as valves open and close can be a problem. Approaching particle-free operation is a prerequisite.

Q

Simple structure

A

The simple structure minimizes breakdowns.

Q

What is the long life (in-house bellows adoption)?

A

We are also a bellows manufacturer. We have been supplying bellows to our customers for more than 50 years since our establishment.
The long-life bellows produced by our long years of experience help to ensure the high quality of our valves..

Related Information

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Solution cases

Inquiry

For document requests and inquiries,
Please contact us using the email form below or by phone.