"KOSLARZE" Both-sided seal Seal direction change type

Over the last three decades, the semiconductor market has evolved without being
bound by Moore's Law, and miniaturization has made rapid progress from Microscale to nanoscale. Manufacturing equipment has also been miniaturized through continuous technological development, and the vacuum gate valves mounted on it are also required to constantly improve their performance. We are working on high functionality every day to meet the growing market demand.

• • Single-sided seal　Normal type
    A gate valve developed and developed with "non-sliding" as a design concept. Since its birth, its reliable performance has been evaluated, and it is now used in various markets and environments.
    We will customize it according to the diverse needs of our customers, such as opening size, pressure conditions, high temperature compatibility, and the presence or absence of a valve box. 
  •  Both-sided seal    Seal direction switching type
    A gate valve with additional functions added to the Normal type. By switching the seal direction to the transfer chamber side, a vacuum other than the process chamber that is open to the atmosphere is maintained, so that the equipment can continue to operate even during maintenance of the process chamber. In that state, the O-ring for the valve plate seal on the process chamber side can be easily replaced.