Vacuum Components

As a trusted supplier of manufacturing equipment for high-performance semiconductor devices, we provide highly customized vacuum chambers with a one-stop solution—from design to inspection—delivering precision-engineered, high-quality vacuum systems.
Our strength lies in the reliability and expertise that ensure peace of mind for our customers.

Using advanced CAD software such as SolidWorks and iCAD, we create flexible and precise designs for vacuum chambers. Each 3D model undergoes detailed CAE analysis with ANSYS, evaluating stress distribution, deformation, and thermal behavior under heating conditions. This process optimizes performance and reliability, including scenarios involving cooling systems.

By accurately capturing complex customer specifications, we ensure high precision from the design stage, addressing technical challenges with confidence.

Visual design reviews using 3D models streamline meetings and specification adjustments, enhancing both design quality and communication efficiency to support your development process.

Our facilities include vertical and horizontal machining centers, multi-task CNC lathes, and 5-axis machines, allowing us to select the most suitable process for each product’s shape, material, and precision requirements.

For large vacuum chambers, equipment capability directly impacts quality and lead time. By leveraging 5-axis vertical multi-task lathes, we achieve high-precision machining of complex shapes and multiple surfaces in a single setup—reducing tool changes and re-fixturing, minimizing errors, and improving efficiency.

We also handle simultaneous machining of complex curves and inclined surfaces, supporting high design flexibility and faithfully realizing the designer’s intent. This ensures reliable vacuum equipment that meets stringent semiconductor industry standards.

We conduct rigorous quality inspections across multiple stages, including dimensional checks, visual inspections, and leak testing using helium leak tests. These inspections comprehensively evaluate product accuracy, sealing performance, and surface quality—an essential process to ensure the reliability of vacuum equipment.

During dimensional inspection, we use high-precision measuring instruments to verify deviations from design drawings at the micron level, ensuring the alignment and integrity of functional components.
For visual inspection, we carefully check welds, machined surfaces, and the uniformity of surface treatments to enhance the overall quality of the finished product.

In particular, helium leak testing detects minute leaks using helium gas and rigorously evaluates sealing performance under vacuum conditions. For semiconductor manufacturing equipment, where high vacuum retention is essential, a leak-free structure is directly linked to product safety and long-term stable operation.

Through these inspection processes, we have established a system that allows us to deliver high-quality vacuum equipment with performance exactly as designed, giving customers complete confidence. Consistent quality control minimizes product variation and ensures stable supply and reliable manufacturing.