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Vacuum Components

We provide highly customized vacuum chambers as a supplier of manufacturing equipment for semiconductor devices with strict performance requirements.
We have 5-axis control multitasking machines, vertical machining centers, CNC precision lathes, and 3D measuring instruments, which we utilize when high-precision machining is required, such as vacuum chambers for semiconductor manufacturing equipment and vacuum chambers for accelerators.

*Please contact us for product details and quotations.


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Features of Vacuum Equipment

Precision design, machining and welding technology, and high sealing performance


Our products are used in semiconductor manufacturing equipment, FPD manufacturing equipment, solar cell panel manufacturing equipment, OELD manufacturing equipment, glove boxes, physical and chemical experimental equipment, accelerator facilities, and synchrotron radiation facilities. We also manufacture chambers with special environments such as ultra-high vacuum, plasma environment, and dilute active gas environment inside the vacuum chamber. Gate valves, one of our products, can also be integrated into vacuum chambers for shipment.

In designing vacuum chambers, we make full use of CAD software to create 3D models. These models are subjected to advanced CAE analysis to take into account stress values, deformation, and temperature distribution during heating to optimize product performance and reliability.

             

Source KEK
This is an example of a vacuum chamber

Main Examples

Precision Design and Processing Technology

  • When designing vacuum equipment, we understand the customer's high demanding specifications and translate them into a precision design through the use of CAD software.
  • The product is completed through optimal material selection, difficult machining, welding, cleaning, assembly, and inspection processes. In the case of large chambers, the equipment that is available for processing is also an important factor. We have a full lineup of equipment.
  • Our high vacuum technology also guarantees sealing performance.

Built-in Bellows

  • We have a lineup of Feedthroughs with built-in bellows, taking advantage of our strength as a bellows manufacturer.
  

Types of Vacuum Equipment and Feedthroughs

As vacuum equipment, we offer a variety of products according to different customer specifications and applications. We also offer a variety of feedthroughs.

直進導入機シリーズ

Linear feedthroughs

Linear feedthroughs are products that are used to linearly feed equipment/devices in a vacuum from the atmosphere side while preserving them in a vacuum state.

Our linear feed throughs are used by our customers for various purposes, such as lowering substrate stages and transferring wafers. 



With two types of linear feedthroughs available,
including a bellows seal type and a magnetic seal type with manual and automatic drive systems, IRIE KOKEN offers products that meet various
demands.
回転導入機シリーズ

Rotary feedthroughs

Rotary feedthroughs are products that are used to rotate equipment/devices in a vacuum from the atmosphere side while preserving them in
a vacuum state.

Our rotary feed throughs are used by our customers for various purposes, such as rotating substrates and switching shutters. 



With two types of rotary feedthroughs available, including a bellows seal type and a magnetic seal type with manual and automatic drive systems,
IRIE KOKEN offers products that meet various demands.

Multi-operation feedthroughs

Multi-operation feedthroughs are products that are used to move in more than one direction, linear feeding + rotation or perpendicular direction toward an axis + angular movement.

In particular, the combination of our MFL series and TSL/TSN series are used by our customers in various fields.(Such as semiconductor manufacturing equipment and accelerator-related facilities)

With two types of multi-operation feedthroughs available, including a bellows seal type and a magnetic seal type with manual and automatic
drive systems, IRIE KOKEN offers products that meet various demands.

Frequently Q&A

Q

What size chambers do you offer?

A

The maximum production results are as follows
For stainless steel welded construction
Square type: 1500 mm (W) x 1000 mm (D) x 800 mm (H)
Round type: φ1000 x height 800
Various sizes other than the above are also available.

For machined aluminum alloy
Square type: 1500 mm (W) X 1000 mm (D) X 800 mm (H)
Various sizes other than the above are also available.


Q

I am not sure whether to use stainless steel or aluminum. Please let me know if there are any advantages and disadvantages to be aware of.

A

Stainless steel
Strengths
Durability: Stainless steel is strong and durable. It is suitable for long-term use.
Corrosion resistance: Stainless steel is rustproof and resistant to corrosion.
High temperature resistance: Suitable for use in high temperature environments.
Weldability: Compared to aluminum, stainless steel is easier to weld and can be used for complex structures.
Weaknesses
Weight: Stainless steel is relatively heavy, which is a disadvantage when light weight is required.
Cost: Stainless steel is more expensive than aluminum.

Aluminum
Strengths
Lightweight: Aluminum is lightweight and easy to move and handle.
Cost-effective: Aluminum is relatively inexpensive.
Electrical and thermal conductivity: Aluminum has good electrical and thermal conductivity.
Gas release characteristics: In general, the rate of gas release is lower than that of stainless steel.
However, degassing by high-temperature baking is not possible. Anodized aluminum, which is an anodic oxidation treatment, has a higher gas release rate.
Activation characteristics: Aluminum has lower intensity of induced radioactivity and better attenuation characteristics than stainless steel.
Weaknesses
Low durability: Aluminum is softer and more easily scratched than stainless steel.
Low corrosion resistance: Aluminum is less corrosion resistant than stainless steel.


Which material to choose depends on your specific application and budget.
Stainless steel is better suited when durability and corrosion resistance are important, while aluminum may be a better choice when light weight and cost-effectiveness are desired.


Q

The inside of a vacuum chamber is expected to become hot. What precautions should we take in the event of high temperatures?

A

Regarding sealing materials, metal seals should be used, or in the case of elastomer O-rings, water cooling is required to keep the temperature below the O-ring's normal heat resistance temperature.
Even in the case of metal seals, it is desirable to control the temperature to be below the typical copper gasket's heat resistance temperature, which is about 400 degrees Celsius.
The chamber body, if made of stainless steel, maintains its mechanical strength up to about 500°C. However, a water-cooled jacket structure should be adopted on the chamber wall in consideration of the above-mentioned sealability issues and safety to the surrounding environment.
Placing several non-contact polished heat shields inside the chamber is also effective in reducing radiation heat transfer.

Related Information

Column

Solution cases

Technical Information

Please take a look at the technical information on bellows.

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Inquiry

For document requests and inquiries,
Please contact us using the email form below or by phone.