As is commonly known, the atmospheric pressure is a pressure corresponding to the weight of about 9.8N (≒1kgw) per square centimeter at approximately 100kPa. Assuming that the opening size of a vacuum gate valve (rectangular) is 300mm × 2000mm, It is necessary to have as much sealing force as the gross weight (8 ton) of a 4-ton truck with cargo. In other words, a valve that operates 1,000,000 times with this force needs to be large in weight and size with improvement in the rigidity of the valve body, with the result that manufacturing costs will increase, leaving only negative effects from a manufacturing perspective.
Therefore, IRIE KOKEN has developed a “differential pressure cancellation valve” in order to solve the above problems in upsizing the openings of gate valves.
・Ultra-large size for FPD/OLED equipment (up to G10.5)
・Equipped with pressure cancellation mechanism
・Long life (in-house bellows)
leak rate |
Body:1 × 10-10[Pa・m3/s] Gate:5 × 10-10[Pa・m3/s] (Negative pressure) |
---|---|
Temperature | Body:120[℃ ] Actuator: :60[℃ ] |
Pend/Close moving time | 2.5 ~ 5.0[s] |
Material |
Body :A5052/SUS304 Bellows:AM350、SUS304 (Pressure cancellation) Gate:A5052 Sealing :FKM |
Operating Air pressure | 0.45 ~ 0.60[MPa] |
Service life | 1M[Cycles] |
Option |
Spec without Pressure cancellation |
If you have specific requirements, please let us know the details of your specifications.
Please feel free to contact us for force calculation and design proposals that meet your required specifications.
In the manufacture of flat panel displays, glass plates are becoming larger and displays are becoming higher resolution. Gate valve gullivers can easily be made with larger seal apertures, and we have a wealth of experience with G5 to G10.5 substrate sizes.
A vacuum gate valve with an opening size of 300 mm x 2000 mm requires a sealing force as large as about 8 tons.
We have developed a “differential pressure cancel valve” to solve this problem.
We are also a bellows manufacturer. We have been supplying bellows to our customers for more than 50 years since our establishment.
The long-life bellows produced by our long years of experience help to ensure the high quality of our valves.
Please take a look at the technical information on gate valves.
For document requests and inquiries,
Please contact us using the email form below or by phone.