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"GARIVA" Both-sided seal T-motion

Differential pressure cancellation mechanism is used.
Easy to increase seal aperture size (field proven from G5 to G10).
Improvement in reliability of seal performance.
Because no inclination operation of the valve plate is required, sealing operation stabilizes, improving reliability.

    • L-motion type
      It is a gate valve that is synonymous with our company, which specializes in large opening sizes. By mounting a cylinder that combines an in-house bellows on the valve plate unit, stable
      sealability can be ensured even with a large opening. In addition, by incorporating a differential pressure canceling structure, it is possible to significantly reduce the pressure difference that
      acts on the valve plate when dealing with reverse pressure.

    • T-motion type
      A gate valve that is an evolution of the L-motion type. The operating time can be shortened by operating the two valve plates at the same time during Lock to Free. In addition, since there is no deformation of the rod, the generation of vibration due to the reaction force can be suppressed. Switching of operation mode can also be selected as an option.


koslarze2 SEMI.jpg

Both-side seal  T-motion


・For ultra-large FPD/OLED devices (~ G10.5)
・High-speed operation by T-motion mechanism
・Long life (using in-house bellows)

Specifications


Leak rate
 Body :1 × 10-10[Pa・m3/s]
 Gate :5 × 10-10[Pa・m3/s]
     (Equal pressure) 

Temperature

Body/Gate :120[℃ ]

Actuator :60[℃ ]
Open/Close moving time  2.5 ~ 4.0[s]


Material


Body :A5052/SUS304
Bellows :AM350

Gate :A5052
Sealing :FKM
Operating Air pressure  0.45 ~ 0.60[MPa]
Service life 1M[Cycles]
                                                     
ガリバー L-motion

Single-sided seal
L-motion
 For FPD/OLED manufacturing equipment, vacuum gate valve.

コスラーズ seal 方向切り替えtype

Both-sided seal
T-motion

Vacuum gate valve with additional functions to L-motion.

Custom Design

Please let us know your requirements.
We will consider your request individually.

  • We want to reduce particles to accommodate miniaturization.
  • We want to reduce the release of adherent particles by reducing vibration.
  • We want to reduce equipment downtime during maintenance.

If you have specific requirements, please let us know the details of your specifications.
We will be happy to provide you with force calculations and design proposals that meet your required specifications.

コスラーズ

KOSLARZE

A gate valve developed and developed with "non-sliding" as a design concept.

----------------------------------------------------------I want to use it as a sluice valve for semiconductor manufacturing equipment.

Please select the following case
ガリバー

GARIVA

It is a gate valve that is synonymous with our company, which specializes in large opening sizes.
----------------------------------------------------------I want to use it as a sluice valve for flat panel display manufacturing equipment.

Please select the following case
マリーナ

MARINA




----------------------------------------------------------I want to use it as an exhaust valve.


Please select the following case

FQA

Q

Ultra-large size for FPD/OLED equipment (up to G10.5)

A

In the manufacture of flat panel displays, glass plates are becoming larger and larger, and displays are becoming higher in resolution. Gate valve Gulliver can easily be used for larger seal apertures, and we have a wealth of experience with G5 to G10.5.

Q

High-speed operation by T-motion mechanism

A

We are constantly receiving requests to shorten takt time, and the T-motion mechanism can shorten takt time.

Q

What is the long life (in-house bellows adoption)?

A

We are also a bellows manufacturer. We have been supplying bellows to our customers for more than 50 years since our establishment.
The long-life bellows produced by our long years of experience help to ensure the high quality of our valves.

Related Information

Columns

Solution cases

Technical Information

Please take a look at the technical information on gate valves.

Detail page

Inquiry

For document requests and inquiries,
Please contact us using the email form below or by phone.