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Metal Bellows

In addition to being used as an expansion joint for piping, it is used in a wide range of fields such as semiconductors, liquid crystals, vacuum equipment, accelerators, nuclear fusion, nuclear power, petrochemicals, railways, medical care, and construction, taking advantage of its excellent airtightness. It has been.
Welded Bellows

Welded Bellows

This metal bellows is manufactured by alternately welding the inner and outer diameters of thin metal plates on precision discs and joining them together.
Molded Bellows

Formed Bellows

Historically older than welded bellows, various manufacturing methods have been devised. The most commonly used methods are mechanical roll forming and hydraulic bulge forming.
Flexible Tube

Flexible Tube

A flexible tube is a relatively small-diameter bellows used for piping in equipment that can be freely bent.

Vacuum Valve

It is for isolating vacuum from vacuum and vacuum from atmosphere. In addition to being used to isolate various processes in manufacturing displays and semiconductor substrates, it is also used to adjust the pressure of the vacuum chamber by placing it between the vacuum chamber and the vacuum pump.
Vacuum Valve

Rectangular type
Gate Valve

This is a high-quality square gate valve that can also be used for next-generation LSI and LCD manufacturing equipment.
A high level of dust-free operation is strictly required in recent process lines for highly integrated devices, compound semiconductors, and optical devices.

Rectangular type
Large Gate Valve

Employs a differential pressure canceling mechanism, making it easy to increase the size of the seal opening (experienced from G5 to G10), improving the reliability of sealing performance, and eliminating the need for tilting the valve plate, resulting in stable sealing operation and improved reliability.

Round type
Gate Valve

MARINA is a round pendulum type valve with stable sealing performance, simple structure and compact design. We support everything from semiconductor manufacturing equipment to large FPD and organic EL manufacturing equipment.
L-Type Valve(Angle Valve)


L-shape Valve
(High-vacuum Angle Valve)

The High Vacuum Angle Valve is a proven, long-life vacuum valve with a built-in molded/welded bellows. Nine types are currently standardized.

Vacuum Components

Vacuum Chamber

We provide highly customized vacuum chambers as a supplier of manufacturing equipment for semiconductor devices with strict performance requirements.
Vacuum Chamber

Vacuum Feedthroughs


We offer a variety of standardized feedthroughs. Can be used up to high vacuum range. (The bellows type straight line feedthroughs can be used up to ultra-high vacuum.) For the bellows type, we use our own highly reliable metal welded bellows.
Straight (Straight line) Lead-In Machine

Bellows-sealed
linear Feedthroughs

Our linear feedthroughs incorporate highly reliable welded bellows and enable long strokes. We offer both manual and automatic types for each size.

Rotating Feeder

Bellows-sealed
Rotary Feedthroughs

Bellows type rotary feedthroughs are available in high-precision, high-rotation feedthroughs and compact rotary feedthroughs, and are units for transmitting rotary motion from the atmosphere side to the vacuum side.Metal welded bellows are used to separate the vacuum from the atmosphere, so they can be used up to high vacuum ranges.

XY Table

Shutters
XY Tables


We provide high quality XY tables with shutter and advanced positioning technology.

Chamber

Chamber
 


We use the welding and processing technologies we have developed to meet our customers' advanced specifications. We have also delivered many products to national projects.

Inquiry

For document requests and inquiries,
Please contact us using the email form below or by phone.