Linear feedthroughs　ILD-A

Motor-driven type bellows-sealed linear feedthrough（ILD-A)

Feature

1. The welded bellows manufactured by IRIE KOKEN is used for the drive unit seal, enabling use in the ultra-high vacuum range.

2. A lineup of 100 mm and 150 mm stroke is available for each size (CF70, 114, 152, and 203).

3. Reversible motors are standard. (Please contact us for stepping motors, etc.)

4. Limit switches are standard. Potentiometer for position detection is available as an option.

Specification

※左右にフリックしてご覧いただけます。　

Model		ILD-70A			ILD-114A
End of model		50	100	150	50	100	150
Stroke (mm)		50	100	150	50	100	150
Connection flange		CF70			CF114
Drive method		Motor-driven
Leak rate		1×10^-10Pa・m³／s or less
baking temperature		-
Main material		SUS304
Bellow material		SUS316L
Main dimensions	A	＊	50~150	50~200	＊	50~150	50~200
	B	＊	334	459	＊	345	465
	C	＊	96		＊	101
	D	＊	152		＊	165
	φE	＊	38		＊	48
	φF(g6)	＊	12		＊	16
	G	＊	20		＊	35
	H	＊	7.0		＊	12.5
	φI(h7)	＊	8		＊	14
Product drawing download		PDF	PDF	PDF	PDF	PDF	PDF

Model		ILD-152A			ILD-203A
End of model		100	150	200	100	150	200
Stroke (mm)		100	＊150	＊200	100	＊150	＊200
Connection flange		CF152			CF203
Drive method		Motor-driven
Leak rate		1×10^-10Pa・m³／s or less
Baking temperature		-
Main material		SUS304
Bellows material		SUS316L
Main dimensions	A	50~150	＊	＊	50~150	＊	＊
	B	330	＊	＊	330	＊	＊
	C	107	＊	＊	107	＊	＊
	D	170	＊	＊	170	＊	＊
	φE	60	＊	＊	60	＊	＊
	φF(g6)	24	＊	＊	24	＊	＊
	G	35	＊	＊	35	＊	＊
	H	20.0	＊	＊	20.0	＊	＊
	φI(h7)	22	＊	＊	22	＊	＊
Product drawing download		-	-	-	-	-	-
Product drawing download		-	-	-	-	-	-

Individually designed products

Even in cases where specifications cannot be
satisfied with standard products
we will consider your individual needs.

If you have a specific request, please let us know the details of your specifications.
We will propose the best design for various uses, so please feel free to contact us.