FPD Field

What is FPD?

It is an abbreviation for flat panel display.

LCDs and OLEDs are used in TVs, cell phones, PC displays, notebook PCs, car navigation systems, etc., and are now a necessity in our daily lives. 　

What is FPD Manufacturing Equipment?

FPD manufacturing equipment is used to manufacture FPDs.
The demand for larger screens, thinner, higher resolution, and lower cost requires processing large 3m x 3m glass substrates at high speed, and technological innovation in equipment will continue to be necessary in the future.

Vacuum gate valves

Vacuum bellows

Vacuum equipment

Vacuum gate valve (G8.5 also available)

Various gate valves are used in vacuum equipment to shut off the paths through which gases and liquids pass and to control the vacuum environment.

The round shaped openings are mainly used as introduction and exhaust valves for gases and light, and are mainly used at the connection of vacuum piping.
Square shaped valves are used as partition valves in FPD (OLED) manufacturing equipment, where they are placed at the input port of substrates to be transported or between two vacuum chambers.
We also offer sizes exceeding 3,000 mm as glass substrates become larger.

Square Gate Valve GARIVA
Single-sided seal　L-motion

This gate valve is synonymous with our company's strength in large opening sizes. The valve plate unit is equipped with a cylinder combined with our bellows to ensure stable sealing even with a large aperture. In addition, the patented differential pressure canceling structure, which is unique to our company, makes it possible to accommodate any large size.。

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Square Gate Valve GARIVA
Both-sided seal　T-motion

This gate valve is an evolution of the L-motion type, and allows for shorter operating time by operating the two valve plates simultaneously during Lock-Free operation. The rod is not deformed, so vibration caused by reaction force can be suppressed. Operation mode switching can be selected as an option.

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Square-type vacuum gate valve CDV

Used as atmospheric gate for load lock chamber. Highly reliable due to simple mechanism, also applicable to ultra-large size for FPD/OLED equipment. (~G10.5)

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Exhaust valve MARINA

Exhaust valve Marina uses the pressure cancellation mechanism used in the gate valve GARIVA for FPD. Normally up to 400A, but can be supplied up to 500A.

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Angle Valves

Considering the recent order situation and production facilities, we will offer only 9 types of standard catalog products.

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Vacuum bellows

Welded Bellows

Used for parts that maintain a vacuum while operating, such as wafer transfer robots.

Material: General-purpose SUS, AM350 with excellent long-life characteristics, Hastelloy® corrosion-resistant material, etc. can be selected according to the application.

Life: Long life of 10,000 to 10 million cycles is possible, reducing the frequency of parts replacement during equipment operation.

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Formed Bellows

Bellows are used between turbomolecular pumps and chambers for vibration absorption, positioning, and vacuum exhaust piping. A wide selection of standard bellows is available, and special designs can also be accommodated.

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