IRIE KOKEN CO., LTD.
A semiconductor is a substance with electrical properties. Substances include conductors that conduct electricity and insulators that do not conduct electricity, and semiconductors are substances with properties in between. Semiconductors have intelligent information processing functions such as information storage, numerical calculations and logical operations, and play a central role as the brain part of electronic devices and devices.
As the name implies, semiconductor manufacturing equipment is equipment used to manufacture semiconductors. Film forming equipment, trace impurity addition equipment, assembly equipment, inspection equipment, etc.
Over the last three decades, the semiconductor market has evolved without being bound by Moore's Law, and miniaturization has progressed rapidly from microscale to nanoscale. Manufacturing equipment has also been miniaturized through continuous technological development. Our products, vacuum gate valves, vacuum bellows, vacuum equipment, etc. installed in manufacturing equipment are also constantly required to improve their performance.
It is a gate valve developed and developed with "non-sliding" as a design concept. Since its birth, its reliable performance has been evaluated and used in the semiconductor market. We will customize it according to customer's needs such as opening size, pressure condition, high temperature correspondence, presence or absence of gate.
Since it is not necessary to open the transfer chamber side to the atmosphere during maintenance due to deterioration of the O-ring of the gate valve, other process chambers that have not been maintained can be continuously produced. Therefore, the decrease in the operating rate of the equipment can be minimized.
With the recent miniaturization, low particle size is required for parts mounted on semiconductor manufacturing equipment.
We have developed a low particle valve that meets that demand and have adopted it in many next-generation devices.
It is used for parts that maintain vacuum while operating, such as wafer transfer robots.
As a feature,We have a wide lineup from small diameter to large diameter.
・Material: General SUS, AM350 with excellent longevity characteristics, Hastelloy®, a corrosion-resistant material, etc. It can be selected according to the application.
・ Lifespan: A long lifespan of 10,000 to 10 million times is possible, and the frequency of parts replacement during equipment running can be reduced.
・Shape: Round, oval, rectangular, special (deformed) can be supported, and a wide range of choices can be supported.
・Original technology: As a special application, it can also handle twisting operation at the alignment level. A single bellows contributes to the simplification of the device, such as reducing the alignment rotation mechanism.
It is used for vibration absorption, position adjustment purposes, vacuum exhaust piping, etc. between the turbo molecular pump and the chamber. We have a wide variety of standard products, so we have a wide selection range and can handle special designs.
We have chambers and various introduction machines that have complicated shapes and require customized design.
Please contact us as a set with the above bellows, chamber and gate valve.
Click here for a quote or inquiry
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Metal bellows
Vacuum valves
Vacuum piping parts
Vacuum chamber
Feedthroughs
Vacuum Pump
