- HOME
- HOME
- Search by Industry
- Semiconductor Field
Semiconductor Field
What is a Semiconductor?
A semiconductor is a material with electrical properties.
There are two types of materials: conductors that conduct electricity and insulators that do not. Semiconductors have properties in between.
Semiconductors have intelligent information processing functions such as information storage, numerical and logical calculations, and play a central role as the brain of electronic devices and equipment.
What is Semiconductor Manufacturing Equipment?
Semiconductor manufacturing equipment, as the name implies, is equipment used to manufacture semiconductors. Examples include deposition equipment, trace impurity addition equipment, assembly equipment, and inspection equipment.
Over the last three decades, the semiconductor market has evolved without being bound by Moore's Law, and miniaturization has made rapid progress from Microscale to nanoscale. Manufacturing equipment has also been miniaturized through continuous technological development.
Our products, such as vacuum gate valves, vacuum bellows, and vacuum equipment, which are installed in manufacturing equipment, are also required to continuously improve their performance.
Various gate valves are used in vacuum equipment to shut off the paths through which gases and liquids pass and to control the vacuum environment.
Round openings are mainly used at the connection of vacuum piping to introduce and exhaust gases and light.
Square shaped valves are used as partition valves in semiconductor manufacturing equipment, at the inlet of substrates to be transported or between two vacuum chambers.
We offer aperture sizes to match the size of semiconductor wafers, which are mainly 8" and 12" in diameter.
Square-type vacuum gate valve KOSLARZE
Single-sided seal
A gate valve developed and developed with "non-sliding" as a design concept. Since its birth, its
reliable performance has been evaluated, and it is now used in various markets and environments.
We will customize it according to the diverse needs of our customers, such as opening size, pressure conditions, high temperature compatibility, and the presence or absence of a valve box.
Square-type vacuum gate valve KOSLARZE
Both-sided seal
A gate valve with additional functions added to the Normal type. By switching the seal direction to the transfer chamber side, a vacuum other than the process chamber that is open to the atmosphere is maintained, so that the equipment can continue to operate even during maintenance of the process chamber. In that state, the O-ring for the valve plate seal on the process chamber side can be easily replaced.
Square-type vacuum gate valve CDV
Used as an atmospheric gate for load lock chambers. High reliability due to simple mechanism.
Exhaust valve MARINA
Exhaust valve MARINA uses the pressure cancellation mechanism used in the gate valve Gulliver for FPD. Normally up to 400A, but can be supplied up to 500A.
Angle Valves
Considering the recent order situation and production facilities, we will offer only 9 types of standard catalog products.
Welded Bellows
Used for parts that maintain a vacuum while operating, such as wafer transfer robots.
Material: General-purpose SUS, AM350 with excellent long-life characteristics, Hastelloy® corrosion-resistant material, etc. can be selected according to the application.
Life: Long life of 10,000 to 10 million cycles is possible, reducing the frequency of parts replacement during equipment operation.
Formed Bellows
Bellows are used between turbomolecular pumps and chambers for vibration absorption, positioning, and vacuum exhaust piping. A wide selection of standard bellows is available, and special designs can also be accommodated.
We offer chambers and various types of feedthroughs that require customized design due to their complex shapes.
Inquiry
For document requests and inquiries,
Please contact us using the email form below or by phone.
