Vacuum pump detail

Oxygen-free Pd/Ti deposited ICF203 zero length NEG pump (HBD02805000)

See drawing below for details.

Ultimate pressure	10^-8Pa
Exhaust velocity^*1	H₂2,200L/s
Frequency of reuse	10 Times
Protrusions	None 0㎜
Electricity	No power supply required after baking
Activation conditions	150℃ 12ｈ
Material	SUS304L
Size	ICF203

（Units:mm）

Lineup to be released sequentially　　　　　　　　　　　　　　　

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