Japan Vacuum Industry Association Award "Innovation Award"

May 26, 2023, Japan Vacuum Industry Association Award under the theme of "stainless steel flanges and bellows with oxygen-free Pd/Ti non-evaporation getter (NEG)" Received the "Innovation Award" for the year 2022.

"Innovation Award"

■ Award winner
Yoshihiro Kato / Executive Officer, Chief Engineer, Manabu Yabe / General Manager, Development Group, Technical Center (not present), Yu Kano / Technical Center

■ Award under the theme
"stainless steel flanges and bellows with oxygen-free Pd/Ti non-evaporation getter (NEG)"

Winners (Yoshihiro Kato) Comments are as follows.
Thank you very much for the very prestigious Innovation Award. I would like to take this opportunity to express my sincere gratitude to the members of the Screening Committee.The award this time is for "Oxygen-free Pd/Ti non-evaporation getter (NEG) deposited stainless steel flange and bellows. Oxygen-free Pd/Ti NEG has different properties from those of conventional alloy NEG, and is a technology optimized for industrial applications. By coating the flanges and bellows with Pd/Ti (NEG), we have created a highly versatile product as a domestically produced (NEG) product. In the future, we will continue to develop NEGs with higher exhaust characteristics and easier reactivation in order to disseminate this technology to the world. We look forward to your continued support.