What is FPD?

Abbreviation for flat panel display. It is installed in TVs, mobile phones, PC displays, notebook PCs, car navigation systems, etc. such as liquid crystal displays and organic EL displays and is now a daily necessities.

What is FPD manufacturing equipment?

A device for manufacturing FPDs. Larger screens, thinner ones, higher definition, and lower costs are required, and it is required to process large glass substrates of 3m x 3m at high speed, and technological innovation of equipment is required in the future.

Vacuum gate valves (G8.5 compatible)

GARIVA  L-motion

It is a gate valve that is synonymous with our company, which specializes in large opening sizes. By mounting a cylinder that combines our own bellows on the valve plate unit, stable sealability can be ensured even with a large opening. In addition, by incorporating a differential pressure canceling structure that has our own patented technology, we can handle any large diameter size.

GARIVA  L-motion

A gate valve that is an evolution of the L-motion type. The operating time can be shortened by operating the two valve plates at the same time during Lock to Free. In addition, since there is no deformation of the rod, the generation of vibration due to reaction force can be suppressed. Switching the operation mode can also be selected as an option.

Exhaust valves (MARINA)

L-shape valves

         

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Vacuum bellows

Welded bellows

We can manufacture welded bellows with rectangular or special shapes from ordinary round liquids.
In addition, the rectangular bellows can be manufactured according to the size of the chamber gate and can be used for adjusting the mounting position between chambers.

                    Large Rectangular Welded Bellows

Formed bellows

It is used for vibration absorption and position adjustment, such as between a turbo molecular pump and a chamber.

Chambers / Feedthroughs

We have chambers and various introduction machines that have complicated shapes and require customized design.

Vacuum pipe parts

Please contact us as a set with the above bellows, chamber and gate valve.          

         

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Metal bellows Metal bellows
Welded bellows
Formed bellows
Flexible tubes
Vacuum valves Vacuum valves
Rectangular type gate valves
Round type gate valves
Large-size rectangular type
gate valves
L-shape valves
(Angle valves)
Vacuum piping Vacuum piping parts
Clamps
Flanged pipes
Pipe parts
Flexible tubes
L-shape valves
(Angle valves)
Vacuum chamber Vacuum chamber
Chamber
Feed throughs Feedthroughs
Linear feedthroughs
Rotary feedthroughs
Magnetic feedthroughs
NEGVacuum Pump
The ultra-high vacuum pump (NEG)
field
Semiconductor field
FPD (flat panel display) field
Railways field
Accelerator and nuclear fusion field
Medicaldevices field