May 28, 2021 Japan Vacuum Industry Association Award under the theme of "Development and commercialization of seal direction switching gate valve" Received the "Vacuum Component / Parts / Materials Category Award".
Winners (Mr. Yabe) Comments are as follows.
This time, it is a great honor to receive the 2020 JVIA Award / Vacuum Component / Parts / Materials Category Award. Thank you for receiving the award.
The award-winning "Development and commercialization of seal direction switching gate valve" is for semiconductor manufacturing equipment. This technology aims to improve the operating rate. By using this mechanism, the vacuum of the transport chamber It is possible to open the film forming chamber to the atmosphere and To make maintenance easy, and shorten the downtime.
This mechanism is a product that can be realized in the same size as the conventional one while following the basic performance of the conventional gate valve, and is easy to install in the device.
We will continue to contribute to the development of vacuum technology by increasing added value and developing products that are attractive to our customers. thank you very much.
Photo: Winners: Shinya Yamaguchi / General Manager of Overseas Business G, Sales Department, Manabu Yabe / General Manager of Technical Center Development Group, Yusuke Suga / Technical Center