CAD drawing download (member registration required)
The following show basic specifications. Each product will be designed individually at the time of each order.
About model designation --- Please fill in the necessary stroke at the end of the model.
(Example) ILD-70A with a stroke of 100mm: ILD-70A100
Model | ILD-70A | ILD-114A | |||||
---|---|---|---|---|---|---|---|
End of model | 50 | 100 | 150 | 50 | 100 | 150 | |
Stroke (mm) | 50 | 100 | 150 | 50 | 100 | 150 | |
Connection flange | CF70 | CF114 | |||||
Drive method | Motor-driven | ||||||
Leak rate | 1×10-9Pa・m3/s or less | ||||||
Baking temperature | - | ||||||
Main material | SUS304 | ||||||
Bellows material | SUS316L | ||||||
Main dimensions | A | * | 50~150 | 50~200 | * | 50~150 | 50~200 |
B | * | 334 | 459 | * | 345 | 465 | |
C | * | 96 | * | 101 | |||
D | * | 152 | * | 165 | |||
φE | * | 38 | * | 48 | |||
φF(g6) | * | 12 | * | 16 | |||
G | * | 20 | * | 35 | |||
H | * | 7.0 | * | 12.5 | |||
φI(h7) | * | 8 | * | 14 | |||
Product drawing download |
Model | ILD-152A | ILD-203A | |||||
---|---|---|---|---|---|---|---|
End of model | 100 | 150 | 200 | 100 | 150 | 200 | |
Stroke (mm) | 100 | *150 | *200 | 100 | *150 | *200 | |
Connection flange | CF152 | CF203 | |||||
Drive method | Motor-driven | ||||||
Leak rate | 1×10-9Pa・m3/s or less | ||||||
Baking temperature | - | ||||||
Main material | SUS304 | ||||||
Bellows material | SUS316L | ||||||
Main dimensions | A | 50~150 | * | * | 50~150 | * | * |
B | 330 | * | * | 330 | * | * | |
C | 107 | * | * | 107 | * | * | |
D | 170 | * | * | 170 | * | * | |
φE | 60 | * | * | 60 | * | * | |
φF(g6) | 24 | * | * | 24 | * | * | |
G | 35 | * | * | 35 | * | * | |
H | 20.0 | * | * | 20.0 | * | * | |
φI(h7) | 22 | * | * | 22 | * | * | |
Product drawing download | - | - | - | - | - | - | |
- | - | - | - | - | - |
* The automatic type (ILD-70A, 114A) with a stroke of 50mm and (ILD-152A, 203A) with a stroke of 150mm or 200mm is designed individually. For length (B), contact us separately.
<When ordering>
Detailed specifications and dimensions are also introduced in product catalogs.
For delivery time, price and other questions about products, please inquire from there.