IRIE KOKEN CO., LTD.Designers and manufacturers of Vacuum Bellows,
Vacuum Valves, and Vacuum Equipment
IRIE KOKEN offers items that can be used under ultra-high vacuum and other clean environments or under harsh circumstances exposed to reactant gases, chemicals, and other factors with “metal bellows, vacuum valves, vacuum piping, chambers, vacuum feedthroughs, and other vacuum equipment.”
Bellows (metal expansive pipes) are not only used for semiconductor, liquid crystal, and vacuum equipment but also used as airtight sealing members for gases and fluids across a wide range of fields, such as accelerators, nuclear fusion, nuclear power, petrochemicals, railways, medicine, and construction.
The open-close valves can provide isolation between atmospheric pressure and vacuum and between vacuums. Vacuum refers to a “space lower in pressure than the atmospheric pressure (approx. 100,000 Pa ≒ 1000hPa), and IRIE KOKEN’s vacuum valves can isolate 1×10-6Pa (pressure of approx. 100,000,000,000 part of the atmospheric pressure) from the atmospheric pressure.
We offer an extensive lineup of vacuum pipes.
We accept orders for manufacturing chambers which can withstand special internal environments that vary from an ultra-high vacuum to an atmospheric pressure, a plasma environment, a lean active gas environment, etc., including gate valves.
The vacuum equipment enables driving in linear and rotational directions as isolation is provided between the vacuum and atmosphere. We offer 2 types: bellows-sealed and magnetic.
Metal bellows applied products are widely used as rail car parts as a result of many years of use performance and high reliability.
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Metal bellows
Vacuum valves
Vacuum piping parts
Vacuum chamber
Feedthroughs
Vacuum Pump
